Excellent!!! I used to operate and maintain a sputtering machine for various coatings on silicon and ceramic substrates. Chamber was cryo-pumped with a turbo-pumped load lock. I designed and built the magnet array and wrote the operating software (Forth.) Was a two-target chamber with 8-inch diameter targets. We sputtered gold, aluminum, copper, tungsten, Titanium Tungsten, and Quartz. During sputtering Argon gas was used after the chamber was pumped down to 10^-6 mm, DC was used to sputter metals and RF was used to sputter dielectrics. Ti or TiW was often laid down first then the top metal for better adhesion. Targets were water-cooled as were the platforms the substrates sat on as they get quite hot, as you know. The oxygen in your chamber may be why you had problems with Aluminum. Now retired I just finished my own little home vacuum system, diffusion pumped, maybe I'll give sputtering a try again. Thanks for your excellent video!
Excellent, but did you think of shielding? I would rather build it within the microwave oven to be shielded from the microwaves and not to disturb your neighbors.
So can these plates be used for connecting circuits. Let's say for simplicity, I needed a flat wire to connect two LED lights could I use these copper coated glass plates in place of round wire? Would they hold up to long periods of use?
My Dad worked at IBM years ago. I'd always ask what he did. He said he was a tool and dye master machinist. One day he tried to explain a patent he recieved for a "sputtering tool". This was 40 years ago and I'm in shock right now because I never understood it til now. Thank you a n d God bless you.
Clear, straightforward, and concise. Ingeniously simple and readily within reach! Thank you so much - the best presentation of its kind, in my opinion.
Literally made from things in the kitchen: Microwave - MOT, Diodes, magnet, ac power cord, wire Fridge - compressor (vacuum pump) Sink - Vacuum Hose made from sink sprayer, rubber drain port gaskets Cabinet - Pickle Jar Pot - Copper target Under sink - Pipe braces and screws Window - Glass Only things not from the kitchen are the alligator clip leads, the q-tips and the video camera..
appropriate size caps in between inputs from main should limit current, instead of using variac... but variac would be better. but this is awesome build
@Eddie Hitler OK sir but I just found a tutorial on where I can make it with parts that I got in the microwave and refrigerator just like in the first comment said however if it's there something that it's not easy to get hard electrical parts just check it out ua-cam.com/video/c4Sic1DRXJI/v-deo.html I'm looking for suggestions for the ac inlet
Thanks for the effort and spotless results, I explored this field some time ago, but linguistics and cost closed down the chase. Best of luck instructor!
You need to connect an Argon bottle to your sputtering machine. Otherwise, your Copper film is contaminated with Oxygen and Nitrogen. It is probably still usable, though.
YT, it is so refreshing to see a video like yours, no really I mean it, there are so many idiots out there making rediculous contraptions out of junk , I really have to commend you, for going to all the trouble of doing this yourself to get the parts you need for another cool device, thats real ingenuity...good,quality work there-you make coming here worthwhile!
Nice! You can make a mirror for a telescope this way too. Those are really expensive too. A small 6" cost about $40, but a 12" can cost a lot more than you expect. The bigger, the more expensive.
Usualy pyrex is used as glass chamber because it resists to implosion , I think that using normal glass is dangerous. Any way since it works this is a very good and simple way to demonstrate magnetron sputtering technique. Thanks to microwave technology that made easy access to high voltage parts ( transformer, capacitor, and diodes). A good vacuum pump and a sliding voltage are however a bit expensive.
Borosilicate (pyrex) has a lower expansion coefficient than bottle glass and is more resistant to failure from heating. Vacuum bell jars have been in use for many years before there was borosilicate glass and were fine as long as they were not heated.
Very very interesting work. What about microwave radiation and/or X ray emission due to charged particles swirling in the magnetron field and/or X ray or far UV emission because of electrons colision against the anode?
I notice the area that’s not expose is not coated in the copper film. If a circuit configuration was put in the center I’m sure you can create a design that can connect components together without a lot of chemical or anything expensive to build a sturdy circuit, maybe if the magnet on the bottom is in the shape of the configuration of a circuit?????. Or what if the plasma was pull away by a stronger magnet while maintaining its shape offsetting the bottom layer will it create a layer? (have the bottom layer on a smaller voltage while the top have a stronger voltage?
I would like to work with the deposition of tin oxide doped with ITO tin, how do I do? How do I deposit with other material, such as Aluminum, Gemane, Silicon, Phosphorus, Gallium? Can I make multiple layers with this equipment?
Hi there, I'm very impressed and fascinated bye your work! Long story short, my dad wants me to research on PVD coating and I saw your video. So I'm in the process in making my own, but I have one problem I can't seem to find a voltage slider, do you know we're I can find one? Also how much voltage is this part going to face? Thank you for your time! And once again thanks for the great video!!
Hi ! I just having a newbie and simple question : I have a analog ampmeter just like you and I never figured out how to connect it propertly to any circuit. The only difference is mine supposed to be for alternating current. Can you give me some advice for this ?
Can you provide an electrical schematic or wiring diagram of your setup? I read schematics much more easily than I can trace out the wiring from your video. Your project is excellent, BTW!
I made a full wave Rectfier using only one Microwave diode in which position (4 in total). Is it necessary to be 8 in total? (2 in each position). Please help me!
No danger of xrays or microwaves here? I understand that high voltage from MOT is present at anode but apart from that is this setup "safe" enough for the average hobbyst? May be you should put a warning if it is not so... Very interesting!
Is the voltage slider necessary? I have connected mine directly to a 15A plug point and i was wondering if it was safe or not. Also, how do you put a process gas apart form oxygen into the camber and why must be a partial vacuum?
What diodes did you use for the rectifier? I built a FWBR for a MOT project I'm doing and don't know if the standard microwave diodes I used can handle the current at full power, though I do plan on using a resistive load on the primary to keep the current down so maybe they'll work. I just want some diodes that are bullet proof to a MOTs full output, the ones you used look a lot bigger than regular MOT diodes...
no clue what this is practical for but that plasma production sh_t is cool AF and the fact you can focus it with a magnet is cooler yet and now days the can print magnetic fields into any damn shape you like something tells me that this could coalesce. would a roll of leaf work in a kiln for the plates ?
How many inches does your chamber pull to... 29.8inchesHg? I am trying to do a similar but the converted compressor pumps (in series) can only manage 29.5inchesHg... Thanks.
Very nice, thanks for sharing. Be aware that this is so dangerous on multiple levels, make sure you know WELL about microwave transformer/capacitor dangers and also vacuum implosion dangers. MOTs are deadly and you will probably die if making ONE mistake ONE time. Other than that, very interesting stuff. Many similar projects have very high costs but maybe the quality is a bit better also. But its quite amazing this can be done so easily, very nice video.
Good job guy. You've made a nice DC Magnetron sputtering system. It would be great if you had a high vacuum pump such as a turbo pump and used high purity Ar gas so your films are of high quality but for what you have, it's cool. I'll bet that puppy gets terribly hot after a few seconds of operation. Needs water cooling of the cathode. Thanks for sharing. Many years ago I worked with large sputtering system in the semiconductor industry.
Thank you Joe, You are right. It needs something cooling system to do longer sputter. Since my process time was less than 3 minutes, thermal affection was not serious. I really want to use turbo ion pump or cryo pump :-)
You fine sir are a fellow high tech super freak! I've known of this process for copper coating high power laser optics forming nearly perfect mirrors though I never would have considered scaling down that industrial process for home use as you have demonstrated quite impressively I might add. I'm adding laser cutting/machining capability to my large scale 3D printer rig I designed. I decided to scale one up to 24" x 24" x 24" active work area to allow for the production of larger items. The 3/4" black pipe frame is reinforced with 1/4" steel plate welded at all the angles so it is quite rigid. At 220LB I can climb on it with no measurable distortion. I came up with a technique to print carbon fiber as well by impregnating carbon fiber strands into the resin and hardener separately which is then pneumatically pumped by tube to the mixing tube/extruder. I designed the mixing tube in 2 halves for simple cleaning. The head also can carry a 400 watt liquid cooled spindle motor with 360/90 degree freedom for a full 5 axis milling fun as well as a plasma torch. Adding Laser cutting is my end goal. After your video I will now experiment with manufacturing my own copper plated mirrors to bounce the beam around a little with X,Y,Z actuators. Great Video, subscribed!
***** Wow!! You make crazy monster machine!!!!My experimental setup is also for laser optics like perfect/half mirror. I concluded this is the best way to get fine optics-grade-surface at home. I hope this video help you and you achieve your monster. Please upload yours to UA-cam.Thanks,
Hello, according to my investigations, neutral gases are being used for magnetron sputtering method. Have you used any neutral gas in this project ? Thank you.
Is it possible to deposit GaAs onto a substrate in substantial thicknesses (such as mm thick)? I am guessing this would take weeks of the machine being on continuously? If so what is a better way to create layers that thick?
Hi, I sent you an email with a video about my experiment. The potential between two electrodes is about 850-900 VDC, however i couldn't see any plasma turn on. Should i turn off the light? or is there any wiring problem on my set up?
Lol i love this experiment its fantastic you have recycled simple components to perform a complex task. Thanks for sharing as many others around the globe have signified. Happy new year
Very Awesome, absolutely love it. Super job. Where did you learn this and where can I learn more about it? Could you put some more specifics in the comments, like voltage and vacuum levels and the results of any further experimentation, gas types and materials tried etc.Thanks again for the video Best Wishes n Blessings Keith
Hi gilbondfac, I used 57mm diameter / 22mm hole outer magnet that was removed from microwave oven and 15mmdiameter / 4mm hole Neodimium aloy inner magnet bought from China vender. Neodimium inner magnet was inserted to the 22mm hole of the outer magnet. A Silicon rubber small pices were inserted to keep appropriate gap between the magnets. The gap makes magnetron. Finally the magnet assy was set in a cap of IKEA picles. It is quite simple. Best,
Before I watched the end of the video i was thinking about making this machine for making front mirrored glass for my laser and at the end i saw that your main goal is just like mine :D congrats man, nice job :)
can I use a dimmer instead of a variac? I've just made my first attempt, without a variac, and although the plasma turned on, it was too much energy, and burned the joins of my vacuum chamber
AWESOME. Came here looking for making a copper mirror for CO2 laser too! Can you make a partially reflective mirror too? Also, does this method work for aluminum sputtering? it has the best reflective properties at most wavelengths apparently.
Hi YT. Excellent project. Quick question: I dont see you using getter gas (like Argon which is used in general thin film depositions in industries). Under vacuum and no other gas, what was knocking the Cu off the plate on the substrate?
Hi Atul Bawari, Remaining Nitrogen acts as knocking gas. As you pointed, Argon is ideal to make this, however it is hard to get & manage Argon in hobby use. Through my experiment, it was no problem with Nitrogen. Thanks.
I am trying to recreate your work and have managed to create plasmas briefly, but I am see current draws over 8A! Instead of a bridge, I am using a voltage doubler with two microwave oven caps and two stacks of 10A10 diodes (16 diodes for 16kV) with DC output of around 10kV.
hi! great job. I have a question , I think I missed someting. Don't you need an inert gas to run plasma? Is there any gas inlet or do you use residual air in the chamber?
Hi! Very useful video. Answer please two questions: how long time was the layer made in vacuum? What plate and what mirror layer will you make for CO2 laser mirrors?
Hi Vitaly, Is your question processing time? It was 60-150 seconds. The video you saw was real time process, no cut and no fast-forwarding. Actually, the thickness of the film, even after 2.5 minutes deposition, is not enough. It was still slightly translucent. So I will deposit copper onto a metal mirror like HDD platter. Then it will be able to be used as both total reflection mirror and out put coupler. (You need to make a hole in the center of the total reflection mirror to use it as an out put coupler )
dear MrF22guy, You can use an incandescent lamp or an electric heater instead of voltage slider. Wire it in series with MOT, then voltage is to be divided according to their ormic resistance. Find optimum coupling by try and error. see A standard light bulb as a current limiter / voltage divider Thank you for your comment!
carolyn mmitchell throwing them away or giving them to someone who enjoys them also works. go door to door asking if people have pickle jars they dont want then just rinse/wash them out
Hello, great work ! I tried to do something similar with aluminium, but my plasma is not uniform, i have a lot of arcs which are correctly hitting the magnetically zone. Do you think is the vaccum too high (10-3 mbar)? The colour of arcs is purple so i think the vacuum is good enough. The electrode just above the magnet is the cathode and the far one the anode. Thank you
Hugo3191 Hi Hugo3191,Please see previous discussion. Aluminum is difficult to go with at moment. May be residual oxygen, may be affected by a oxide layer on the surface of the target. I am not sure.
in the MOT we have two secondary T (4 v with hi current and 2500 v withe low current), for the dc what is the secondary T used? and should i remove the other secondary T? thanks
How come it is a magnetron plasma, if you disassembled the magnetron and produced AC glow discharge in magnetic field? Magnetron plasma is RF plasma, not a glow-discharge. Or did I get it wrong, and you inject RF from the magnetron into the jar? Then you probably need some shield so you will not heat-up yourself with RF.
Dear YT rich, I want to ask you some questions about your magnetron sputtering system. First of all, How did you make sample holder? Is it conductive or insulator? Then, which glue did you use for vacuum leaks?
Hi Dear, I used water supply washer for making my substrate holder. www.google.co.jp/search?q=%E7%B5%A6%E6%B0%B4%E5%BA%A7%E9%87%91&hl=ja&tbm=isch&tbo=u&source=univ&sa=X&ei=cW7NVMj7E87f8AXEooKACg&ved=0CCoQsAQ&biw=1475&bih=903 Silicon rubber packing was used to seal target and chamber. Epoxy glue sealed cathode M3 screw and glass chamber, and vacuum tube.
Nice work! Have a question though,I see your replies below and you mentioned "you kept the amps at 400mA during sputtering" But then I stopped at around 3:35 where your diode bridge says "350mA max"… I'm currently working on CVD's and have to have thin nickel films,as for the nickel films,I'm mostly copying your setup,mind me using you name?Thanks a lot!
Hi Johnny, You made a pointed question. Exactly 400mA is over current for the bridge. So it was blown up at last. I keep the current within 350mA now. The more current the more deposition rate, you know. 400mA is not a strict request to make it. It is very nice if my set up gave you a little hint! All of information is open and free to use. Let me see if you upload a video of Nickel sputtering. Thank you for your comment.
so the material of the target is the material of the coating at the end, if i want to make an aluminum mirror for a telescope i could use aluminum instead of copper right?? very good video thanks for sharing this
@M T i like to build things, and that mirror is a huge challenge, that's because i don't wanna do it on a hurry or in between other projects, by now im only looking for an usable freezer motor, and of course it has to be all recycling :)
Dear Maksim Bandel, Yes, the bottom copper plate is the coating source. I tried Cu/Au aroy and was very nice film. I am not sure about Ti, W, Ag but could be OK because these metals are stabler against oxidation. I would like to tri them if I have targets.
great vid! I am learning the aspects of aluminum coating for glass paraboloid,and spheroid mirrors for telescope making. Which also involves oxygen, and silicone dioxide sputtering as a protective coating on the pure aluminum, coating.....
Roy, WAO! Its a great challenge if you intend to do it at your home. Aluminum will be OK. But silicone dioxide... It needs RF sputtering because silicon dioxide is not able to be a target due to its quite high resistance. And it is still big challenge if you use silicon, conductive, target and oxygen because it is not simple sputtering but is so called reactive sputtering. Let me know your try. I am very much interested in it! I hope you make it !!
yeah, lol....the aluminum coating isnt too bad, its the others thats really tough! I have an idea of how its done, and unless I was preparing to do the process regularly, (maybe) I will not gather the necessary components to build what I need to undertake this challenge. I am really into astronomy, physics, electronics, magnetism, space, time, or spacetime.....and aspects of engineering. Within a year I hope to at least begin to design the first (that I am aware of) multi mirror reflector telescope. I intent to flat, grind, figure, measure, then polish everything by hand, using equipment I make in house.....as far As far as I know, no home made scope using a multi mirror (multi mirror meaning 3,6,12, or however many in a circular, or close to circular patter on one plane ground, set, or computer and pushrod bent into a spherical, or paraboloid shape) I own 3 scopes, biggest being an 8" reflector style.....aluminum coated and quarts treated as antioxidant. As mirror size goes up, price does too, exponentially....I can buy a "good" scope from a factory for a fair price, but nothing beats a hand ground professionally made, and thoroughly checked optics piece...you dont get that quality from a factory built piece....unless you pay huge bucks! Then just to buy a piece of pyrex, or any low expansion glass is pricey! Which is why I intent to attempt to challenge the laws of physics to between a quarter, and an eight of a wavelenth of light....I intend to use seven 8" pieces of low expansion glass.....2 top, 3 middle, 2 bottom.........If it all goes to plan, I hope to find a kiln, this way I can make the glass as well......but either way...I am set on this style.....it will be very challenging....it will take time, lots of mental focus and many months of work....but when its done it will be worth while. Thanks for writing back........
Roy Hemion Hi Roy, It's a great challenge!!!! I really really hope you to make it. Exactlly, I have never hard home made multi mirror telescope. It's very much exciting!! Sputter aluminum is one way to get mirror. But I recommend to check silver plating method by chemical wet process like Make Glass Mirrors with Silver Nitrate or silver nanoink coating method like Mitsubishi NanBenefit Silver Nano Ink and Media.wmv because it is hard to get inches size mirror by home made sputtering.
Roy Hemion Hi Roy, it's a great project you have there, and a multi mirror system will work because they are already using this config in the spatial sector, the company Amos in Belgium manufactures multi mirror telescopes for satellites and have excellent results.
yes, so are the giant scopes in Chilli, and some in the west of America.....all work using very complicated computers that adjust the mirrors thousands of times per second, and then adjust the wavelength distance as the light travels to a collector where its combined! Look into this subject, as its super complicated, and is not simple as all!.......A good quality multi mirror reflector scope has NEVER been made! All use a sing collection area, or a single glass, pyrex, or other low expansion substrate!
"eat all the pickles" LOL! I can't begin to count all of the vacuum traps I made from tostitos salsa jars. Oh, and all the microwave ovens I let get away, damn!
In 1784 Andrew Crosse was born at Fyne Court in Somerset England, this is near to where i live. In 1836 he was conducting experiments in, what was called back then, electrocrystallization. The locals were frightened by his 'witch craft' due to the bright lights that emanated from the Court windows at night. He would be totally mind blow if he could see what experiments can be done at home with parts reclaimed from an old microwave oven. Brilliant,
you can achieve that "witchcraft" even with less effort. Use a RGB-Led and a arduino, or if you are a novice wizard then just use 3 potentiometers instead ;D
That's awesome. Just learning about this technology. I appreciate the video. I'm curious about the placement of the substrate that you are coating. Does it have to be directly over the target or could it be anywhere in the chamber? I noticed that the glass jar wasn't coated and I'm wondering why. I saw another video that showed deposits on their chamber.
Hi Noneya, Substrate have to be set near plasma so that many sputtered Cu atoms bomber the substrate. The farther from the plasma the thinner coating. More and more deposition gives the chamber thicker coating unless otherwise cleaned up.
Wow, fantastic. YT rich, could this method be used to make gold coated jewelry? PVD is much better than electroplating but the pvd machines are so big and very expensive...
sebastien guyonnet,I don't recommend to use this method to jewelries. Because basically this is a method to make thin film on a planer substrate, not for complicated 3D shape objects like flower, butterfly, etc. Phsicaly sputtered atoms, ex. copper, flies straight from the target to the substrate. It is just like a light. So it makes sunny place and shadow. No depositon will be obtained under over hang. To avoide it you need to move the object roundng against the target. It is too difficult to do on your desktop. Further, the film you will get after such huge effort will not have enough thickness for jewelries. In conclusion, I think chemical plating is the best way to get uniform gold film.
MrJonEvans, Yes, residual and leaking oxygen is a problem. The slower deposition rate, the more oxidation of the film. So faster film forming leads better result.
Thad22, you are right. The further away the lower temperature. But you'll get none on your substrate if you set it far from the plasma. There are appropriate gap between the substrate and the plasma to get better result. In my case, it was around 10 mm.
Excellent!!! I used to operate and maintain a sputtering machine for various coatings on silicon and ceramic substrates. Chamber was cryo-pumped with a turbo-pumped load lock. I designed and built the magnet array and wrote the operating software (Forth.) Was a two-target chamber with 8-inch diameter targets. We sputtered gold, aluminum, copper, tungsten, Titanium Tungsten, and Quartz. During sputtering Argon gas was used after the chamber was pumped down to 10^-6 mm, DC was used to sputter metals and RF was used to sputter dielectrics. Ti or TiW was often laid down first then the top metal for better adhesion. Targets were water-cooled as were the platforms the substrates sat on as they get quite hot, as you know. The oxygen in your chamber may be why you had problems with Aluminum. Now retired I just finished my own little home vacuum system, diffusion pumped, maybe I'll give sputtering a try again. Thanks for your excellent video!
cât de mult este optenia substrat resitencia cu aur?
Excellent, but did you think of shielding? I would rather build it within the microwave oven to be shielded from the microwaves and not to disturb your neighbors.
I am very interested in pvd machines. I need further information can you please help me ?
Can anyone direct me to a video how to DIY PVD of TiO setup?
So can these plates be used for connecting circuits. Let's say for simplicity, I needed a flat wire to connect two LED lights could I use these copper coated glass plates in place of round wire? Would they hold up to long periods of use?
My Dad worked at IBM years ago. I'd always ask what he did. He said he was a tool and dye master machinist. One day he tried to explain a patent he recieved for a "sputtering tool". This was 40 years ago and I'm in shock right now because I never understood it til now. Thank you a n d God bless you.
Clear, straightforward, and concise. Ingeniously simple and readily within reach! Thank you so much - the best presentation of its kind, in my opinion.
Thank you very much Jarroud!
I believe the simpler method gives the better results.
Literally made from things in the kitchen:
Microwave - MOT, Diodes, magnet, ac power cord, wire
Fridge - compressor (vacuum pump)
Sink - Vacuum Hose made from sink sprayer, rubber drain port gaskets
Cabinet - Pickle Jar
Pot - Copper target
Under sink - Pipe braces and screws
Window - Glass
Only things not from the kitchen are the alligator clip leads, the q-tips and the video camera..
+ElfNet Gaming what about the Variac (Voltage Slider) ?? what will be specs (Max Voltage) ??
+Juan Celaya 0-100%, regular variac. You can get away without it if you build it slightly bigger.
appropriate size caps in between inputs from main should limit current, instead of using variac... but variac would be better. but this is awesome build
@Eddie Hitler did you make the laser
@Eddie Hitler OK sir but I just found a tutorial on where I can make it with parts that I got in the microwave and refrigerator just like in the first comment said however if it's there something that it's not easy to get hard electrical parts just check it out ua-cam.com/video/c4Sic1DRXJI/v-deo.html I'm looking for suggestions for the ac inlet
Thanks for the effort and spotless results, I explored this field some time ago, but linguistics and cost closed down the chase. Best of luck instructor!
You need to connect an Argon bottle to your sputtering machine. Otherwise, your Copper film is contaminated with Oxygen and Nitrogen. It is probably still usable, though.
YT, it is so refreshing to see a video like yours, no really I mean it, there are so many idiots out there making rediculous contraptions out of junk , I really have to commend you, for going to all the trouble of doing this yourself to get the parts you need for another cool device, thats real ingenuity...good,quality work there-you make coming here worthwhile!
Forget the shiny metallic stuff, that plasm was awesome!!
Wow. Thanks. This is the most impressive DIY set of projects I have ever seen.
Trueeee
"Dig a 3mm through hole in the glass" (2:16)
[gets the shovel from garden]
[breaks the glass with it]
Nice! You can make a mirror for a telescope this way too. Those are really expensive too. A small 6" cost about $40, but a 12" can cost a lot more than you expect. The bigger, the more expensive.
soo then make a 24 inch lol then you are a millionaire
Thanx Luca-san,
The next is turning on my CO2 LASER with mirrors made by this sputtering method.
Coming soon. Look forward to the next film!
Sadly we never got that video.
👍
I have seen this video many times and I still find it fascinating.
Edit: So I bought a pump, chamber and variac. I still need some fittings and such.
Have you tried with a graphite electrode and depositing "graphene" in the crystal plate...?
+skycollection This. This I like
That would be good
carbon sputtering rate is extremely low. There are much more effective techniques to produce graphene in lab or home conditions.
eb gun evaporation technique can work for graphene but it must have power supply of 6kv
I made same this DC desktop 🤩 I followed your video.🎉thankyu sir
That was an excellent build and demonstration. Thank you!
Please try to make a thin film solar cell with it. Many thanks.
Usualy pyrex is used as glass chamber because it resists to implosion , I think that using normal glass is dangerous. Any way since it works this is a very good and simple way to demonstrate magnetron sputtering technique. Thanks to microwave technology that made easy access to high voltage parts ( transformer, capacitor, and diodes). A good vacuum pump and a sliding voltage are however a bit expensive.
Borosilicate (pyrex) has a lower expansion coefficient than bottle glass and is more resistant to failure from heating. Vacuum bell jars have been in use for many years before there was borosilicate glass and were fine as long as they were not heated.
Also, does the coin show any physical signs of wear or depletion?
How much vacuum is there? How deep the vacuum should be? 0,00001 more? Less? For constant plasma generation? What pump do you have?
Very very interesting work. What about microwave radiation and/or X ray emission due to charged particles swirling in the magnetron field and/or X ray or far UV emission because of electrons colision against the anode?
Where do all this come from
I'm really amazed, with this method may be possible to create dichroic light filters.
I notice the area that’s not expose is not coated in the copper film. If a circuit configuration was put in the center I’m sure you can create a design that can connect components together without a lot of chemical or anything expensive to build a sturdy circuit, maybe if the magnet on the bottom is in the shape of the configuration of a circuit?????. Or what if the plasma was pull away by a stronger magnet while maintaining its shape offsetting the bottom layer will it create a layer? (have the bottom layer on a smaller voltage while the top have a stronger voltage?
I would like to work with the deposition of tin oxide doped with ITO tin, how do I do? How do I deposit with other material, such as Aluminum, Gemane, Silicon, Phosphorus, Gallium? Can I make multiple layers with this equipment?
Hi there, I'm very impressed and fascinated bye your work! Long story short, my dad wants me to research on PVD coating and I saw your video. So I'm in the process in making my own, but I have one problem I can't seem to find a voltage slider, do you know we're I can find one? Also how much voltage is this part going to face? Thank you for your time! And once again thanks for the great video!!
Hello did you finally succeed?
Hello. This is quite an awesome video. How would you sputter a very small amount of metal? Such as platinum. Also, must the metal be in solid form?
Hi ! I just having a newbie and simple question : I have a analog ampmeter just like you and I never figured out how to connect it propertly to any circuit. The only difference is mine supposed to be for alternating current. Can you give me some advice for this ?
Can you provide an electrical schematic or wiring diagram of your setup? I read schematics much more easily than I can trace out the wiring from your video.
Your project is excellent, BTW!
I made a full wave Rectfier using only one Microwave diode in which position (4 in total). Is it necessary to be 8 in total? (2 in each position). Please help me!
No danger of xrays or microwaves here? I understand that high voltage from MOT is present at anode but apart from that is this setup "safe" enough for the average hobbyst? May be you should put a warning if it is not so... Very interesting!
Is the voltage slider necessary? I have connected mine directly to a 15A plug point and i was wondering if it was safe or not. Also, how do you put a process gas apart form oxygen into the camber and why must be a partial vacuum?
That is impressive.! i SO regret not doing electronics in school...
Nice job! Do you have any idea of what pressure this is operating at?
What diodes did you use for the rectifier? I built a FWBR for a MOT project I'm doing and don't know if the standard microwave diodes I used can handle the current at full power, though I do plan on using a resistive load on the primary to keep the current down so maybe they'll work. I just want some diodes that are bullet proof to a MOTs full output, the ones you used look a lot bigger than regular MOT diodes...
no clue what this is practical for but that plasma production sh_t is cool AF and the fact you can focus it with a magnet is cooler yet and now days the can print magnetic fields into any damn shape you like something tells me that this could coalesce. would a roll of leaf work in a kiln for the plates ?
How many inches does your chamber pull to... 29.8inchesHg? I am trying to do a similar but the converted compressor pumps (in series) can only manage 29.5inchesHg... Thanks.
Sputtering on to cheap metal drill bits with this device is possible?
Is it possible to put a metal-film on other materials than glass? For example crystals (sugar-crystals, salt-crystals or other selfmade crystals)?
Very nice, thanks for sharing.
Be aware that this is so dangerous on multiple levels, make sure you know WELL about microwave transformer/capacitor dangers and also vacuum implosion dangers.
MOTs are deadly and you will probably die if making ONE mistake ONE time.
Other than that, very interesting stuff. Many similar projects have very high costs but maybe the quality is a bit better also.
But its quite amazing this can be done so easily, very nice video.
And please, what the materials are u put on the anode? (need something special to put on this place, or can be a normal screw only?
Good job guy. You've made a nice DC Magnetron sputtering system. It would be great if you had a high vacuum pump such as a turbo pump and used high purity Ar gas so your films are of high quality but for what you have, it's cool. I'll bet that puppy gets terribly hot after a few seconds of operation. Needs water cooling of the cathode. Thanks for sharing. Many years ago I worked with large sputtering system in the semiconductor industry.
Thank you Joe,
You are right. It needs something cooling system to do longer sputter. Since my process time was less than 3 minutes, thermal affection was not serious.
I really want to use turbo ion pump or cryo pump :-)
any thanks for sharing, what is the value of potential when you obtain the glow?
You fine sir are a fellow high tech super freak! I've known of this process for copper coating high power laser optics forming nearly perfect mirrors though I never would have considered scaling down that industrial process for home use as you have demonstrated quite impressively I might add. I'm adding laser cutting/machining capability to my large scale 3D printer rig I designed. I decided to scale one up to 24" x 24" x 24" active work area to allow for the production of larger items. The 3/4" black pipe frame is reinforced with 1/4" steel plate welded at all the angles so it is quite rigid. At 220LB I can climb on it with no measurable distortion. I came up with a technique to print carbon fiber as well by impregnating carbon fiber strands into the resin and hardener separately which is then pneumatically pumped by tube to the mixing tube/extruder. I designed the mixing tube in 2 halves for simple cleaning. The head also can carry a 400 watt liquid cooled spindle motor with 360/90 degree freedom for a full 5 axis milling fun as well as a plasma torch. Adding Laser cutting is my end goal. After your video I will now experiment with manufacturing my own copper plated mirrors to bounce the beam around a little with X,Y,Z actuators. Great Video, subscribed!
***** Wow!! You make crazy monster machine!!!!My experimental setup is also for laser optics like perfect/half mirror. I concluded this is the best way to get fine optics-grade-surface at home. I hope this video help you and you achieve your monster. Please upload yours to UA-cam.Thanks,
Hello,
according to my investigations, neutral gases are being used for magnetron sputtering method. Have you used any neutral gas in this project ?
Thank you.
How did you know the jam jar would not implode under vac?
Have you tried different feed gasses?
I'm interested in making one of these....
One of the coolest videos I've even seen!
www.tianbometal.com ; wwww.bjtianbometal.com Metal target, titanium target, zirconium target factory specialized production
Hi dude excelente video i have only one question , which Diodes you utilized for making the bridge before capacitor?
Is it possible to deposit GaAs onto a substrate in substantial thicknesses (such as mm thick)? I am guessing this would take weeks of the machine being on continuously? If so what is a better way to create layers that thick?
Hi, I sent you an email with a video about my experiment.
The potential between two electrodes is about 850-900 VDC, however i couldn't see any plasma turn on.
Should i turn off the light? or is there any wiring problem on my set up?
Do i understand correctly that your base + the magnet under the base is your magnetron? So you are shooting the base metal onto the piece of glass?
Awesome...
Thank you for such a wonderful video.
ok i spoke to soon what is the plate used for you had to have good reason to go that far to film it that way ? laser lens what? please
Lol i love this experiment its fantastic you have recycled simple components to perform a complex task. Thanks for sharing as many others around the globe have signified. Happy new year
what is the pressure inside? I also want to make such device and interesting which vacuum pump to buy/
Very Awesome, absolutely love it. Super job. Where did you learn this and where can I learn more about it? Could you put some more specifics in the comments, like voltage and vacuum levels and the results of any further experimentation, gas types and materials tried etc.Thanks again for the video Best Wishes n Blessings Keith
this is much to cool but to qeuations i saw another video he uses argon but you do it without ? and 2nd what metirals are able to sputter
Sir you are ginius 🙏🏻🙏🏻, Please make next video this type and enhance the quality of video.
Sir, wondering if you used any gas medium like Argon. Can the chamber still strike even with ouy any gas like Ar?
Great experiment ! congratulation...what sort of cylinder you've used to make circular magnet gap ? best regards
Hi gilbondfac,
I used 57mm diameter / 22mm hole outer magnet that was removed from microwave oven and 15mmdiameter / 4mm hole Neodimium aloy inner magnet bought from China vender. Neodimium inner magnet was inserted to the 22mm hole of the outer magnet. A Silicon rubber small pices were inserted to keep appropriate gap between the magnets. The gap makes magnetron. Finally the magnet assy was set in a cap of IKEA picles. It is quite simple.
Best,
What kind of material can i use as a mask in order to obtain a pattern in the sputtering? Awesome video btw
Nice work and explanation .
I have a question if you don't mind : can i use this sputtering machine to coat a thin pvc film with aluminium ?
Any problems with the jar heating up too much?
Dude your video is amazing! Thanks so much!
Thanks for uploading. I really needed this. I will let you know in 2 months! I cann't wait.
Solar, digg it!
I am awaiting your good results!
Before I watched the end of the video i was thinking about making this machine for making front mirrored glass for my laser and at the end i saw that your main goal is just like mine :D congrats man, nice job :)
pooyamz Hey my brother!Let's make homemade LASER. It's so exciting.
Does the target have to be a big metal plate or can it be thinner (something like metal foil)
can I use a dimmer instead of a variac? I've just made my first attempt, without a variac, and although the plasma turned on, it was too much energy, and burned the joins of my vacuum chamber
I like your wideo and your humor. Than you !
Is deposition uniform enough to make optical dichroics - i.e. low abberation of transmitted light?
Hi ehelix,
film uniformity depends on surface roughness of the substrate. The smoother the better for optical use.
Are you using any argon or other noble gas delivery to the sputter coater?
AWESOME. Came here looking for making a copper mirror for CO2 laser too! Can you make a partially reflective mirror too? Also, does this method work for aluminum sputtering? it has the best reflective properties at most wavelengths apparently.
did you build your own microphone (out of car parts) for this video?
Hi YT. Excellent project. Quick question: I dont see you using getter gas (like Argon which is used in general thin film depositions in industries). Under vacuum and no other gas, what was knocking the Cu off the plate on the substrate?
Hi Atul Bawari,
Remaining Nitrogen acts as knocking gas. As you pointed, Argon is ideal to make this, however it is hard to get & manage Argon in hobby use.
Through my experiment, it was no problem with Nitrogen.
Thanks.
It would be great if this could restore the car lights plastic reflectors. Any idea to build such a machine !
I am trying to recreate your work and have managed to create plasmas briefly, but I am see current draws over 8A! Instead of a bridge, I am using a voltage doubler with two microwave oven caps and two stacks of 10A10 diodes (16 diodes for 16kV) with DC output of around 10kV.
hi! great job. I have a question , I think I missed someting. Don't you need an inert gas to run plasma? Is there any gas inlet or do you use residual air in the chamber?
Faruk Durulmus Hi Faruk, it is residual air. It is enough to get film with good quality.
Hi! Very useful video. Answer please two questions: how long time was the layer made in vacuum? What plate and what mirror layer will you make for CO2 laser mirrors?
Hi Vitaly,
Is your question processing time? It was 60-150 seconds. The video you saw was real time process, no cut and no fast-forwarding.
Actually, the thickness of the film, even after 2.5 minutes deposition, is not enough. It was still slightly translucent. So I will deposit copper onto a metal mirror like HDD platter. Then it will be able to be used as both total reflection mirror and out put coupler. (You need to make a hole in the center of the total reflection mirror to use it as an out put coupler )
I'm curious if you had to remove a bleeder resistor from the microwave capacitor or if by chance it did not have one inside?
My hero! Subscribed and looking forward to watching your other vids.
dear MrF22guy,
You can use an incandescent lamp or an electric heater instead of voltage slider.
Wire it in series with MOT, then voltage is to be divided according to their ormic resistance. Find optimum coupling by try and error.
see A standard light bulb as a current limiter / voltage divider
Thank you for your comment!
YT rich do you really have to eat all the pickles? gross.
carolyn mmitchell throwing them away or giving them to someone who enjoys them also works. go door to door asking if people have pickle jars they dont want then just rinse/wash them out
Can u plz tell at what dc voltage glow is started ? And what is diode serial number ? And how u make that diode bridge ?
Hello, great work ! I tried to do something similar with aluminium, but my plasma is not uniform, i have a lot of arcs which are correctly hitting the magnetically zone. Do you think is the vaccum too high (10-3 mbar)? The colour of arcs is purple so i think the vacuum is good enough. The electrode just above the magnet is the cathode and the far one the anode. Thank you
Hugo3191 Hi Hugo3191,Please see previous discussion. Aluminum is difficult to go with at moment. May be residual oxygen, may be affected by a oxide layer on the surface of the target. I am not sure.
+YT rich Any idea what vacuum levels you had to achieve to initiate the plasma arc?
Thanks very good excellent if will coating with aluminium what work doing,
in the MOT we have two secondary T (4 v with hi current and 2500 v withe low current), for the dc what is the secondary T used? and should i remove the other secondary T?
thanks
How come it is a magnetron plasma, if you disassembled the magnetron and produced AC glow discharge in magnetic field? Magnetron plasma is RF plasma, not a glow-discharge. Or did I get it wrong, and you inject RF from the magnetron into the jar? Then you probably need some shield so you will not heat-up yourself with RF.
Dear YT rich,
I want to ask you some questions about your magnetron sputtering system.
First of all, How did you make sample holder? Is it conductive or insulator? Then, which glue did you use for vacuum leaks?
Hi Dear,
I used water supply washer for making my substrate holder.
www.google.co.jp/search?q=%E7%B5%A6%E6%B0%B4%E5%BA%A7%E9%87%91&hl=ja&tbm=isch&tbo=u&source=univ&sa=X&ei=cW7NVMj7E87f8AXEooKACg&ved=0CCoQsAQ&biw=1475&bih=903
Silicon rubber packing was used to seal target and chamber. Epoxy glue sealed cathode M3 screw and glass chamber, and vacuum tube.
Nice work!
Have a question though,I see your replies below and you mentioned "you kept the amps at 400mA during sputtering"
But then I stopped at around 3:35 where your diode bridge says "350mA max"…
I'm currently working on CVD's and have to have thin nickel films,as for the nickel films,I'm mostly copying your setup,mind me using you name?Thanks a lot!
Hi Johnny,
You made a pointed question. Exactly 400mA is over current for the bridge. So it was blown up at last. I keep the current within 350mA now. The more current the more deposition rate, you know. 400mA is not a strict request to make it.
It is very nice if my set up gave you a little hint! All of information is open and free to use. Let me see if you upload a video of Nickel sputtering.
Thank you for your comment.
Is it possible to sputter titanium oxide and silicon oxide using this method?
so the material of the target is the material of the coating at the end, if i want to make an aluminum mirror for a telescope i could use aluminum instead of copper right?? very good video thanks for sharing this
@M T just as that on a glass jar and a fridge motor for the pump
@M T nope, i'm on repairing stuff in here, i do mostly audio related electronics, and when i finish work i do that.
is for a telescope mirror
@M T i like to build things, and that mirror is a huge challenge, that's because i don't wanna do it on a hurry or in between other projects, by now im only looking for an usable freezer motor, and of course it has to be all recycling :)
@M T thanks, i think is too much garbage around. i want to use it all
So. Was the was it a copper plating form the bottom?
Can it be done with Ti, W, Ag or Au?
Dear Maksim Bandel,
Yes, the bottom copper plate is the coating source.
I tried Cu/Au aroy and was very nice film. I am not sure about Ti, W, Ag but could be OK because these metals are stabler against oxidation.
I would like to tri them if I have targets.
great vid! I am learning the aspects of aluminum coating for glass paraboloid,and spheroid mirrors for telescope making. Which also involves oxygen, and silicone dioxide sputtering as a protective coating on the pure aluminum, coating.....
Roy,
WAO! Its a great challenge if you intend to do it at your home.
Aluminum will be OK. But silicone dioxide... It needs RF sputtering because silicon dioxide is not able to be a target due to its quite high resistance. And it is still big challenge if you use silicon, conductive, target and oxygen because it is not simple sputtering but is so called reactive sputtering.
Let me know your try. I am very much interested in it! I hope you make it !!
yeah, lol....the aluminum coating isnt too bad, its the others thats really tough! I have an idea of how its done, and unless I was preparing to do the process regularly, (maybe) I will not gather the necessary components to build what I need to undertake this challenge. I am really into astronomy, physics, electronics, magnetism, space, time, or spacetime.....and aspects of engineering. Within a year I hope to at least begin to design the first (that I am aware of) multi mirror reflector telescope. I intent to flat, grind, figure, measure, then polish everything by hand, using equipment I make in house.....as far As far as I know, no home made scope using a multi mirror (multi mirror meaning 3,6,12, or however many in a circular, or close to circular patter on one plane ground, set, or computer and pushrod bent into a spherical, or paraboloid shape) I own 3 scopes, biggest being an 8" reflector style.....aluminum coated and quarts treated as antioxidant. As mirror size goes up, price does too, exponentially....I can buy a "good" scope from a factory for a fair price, but nothing beats a hand ground professionally made, and thoroughly checked optics piece...you dont get that quality from a factory built piece....unless you pay huge bucks! Then just to buy a piece of pyrex, or any low expansion glass is pricey! Which is why I intent to attempt to challenge the laws of physics to between a quarter, and an eight of a wavelenth of light....I intend to use seven 8" pieces of low expansion glass.....2 top, 3 middle, 2 bottom.........If it all goes to plan, I hope to find a kiln, this way I can make the glass as well......but either way...I am set on this style.....it will be very challenging....it will take time, lots of mental focus and many months of work....but when its done it will be worth while. Thanks for writing back........
Roy Hemion Hi Roy,
It's a great challenge!!!!
I really really hope you to make it.
Exactlly, I have never hard home made multi mirror telescope. It's very much exciting!!
Sputter aluminum is one way to get mirror. But I recommend to check silver plating method by chemical wet process like
Make Glass Mirrors with Silver Nitrate
or silver nanoink coating method like
Mitsubishi NanBenefit Silver Nano Ink and Media.wmv
because it is hard to get inches size mirror by home made sputtering.
Roy Hemion
Hi Roy, it's a great project you have there, and a multi mirror system will work because they are already using this config in the spatial sector, the company Amos in Belgium manufactures multi mirror telescopes for satellites and have excellent results.
yes, so are the giant scopes in Chilli, and some in the west of America.....all work using very complicated computers that adjust the mirrors thousands of times per second, and then adjust the wavelength distance as the light travels to a collector where its combined! Look into this subject, as its super complicated, and is not simple as all!.......A good quality multi mirror reflector scope has NEVER been made! All use a sing collection area, or a single glass, pyrex, or other low expansion substrate!
With handy grinder and diamond bur bit (ball shape 2 mm diameter). It's quite easy.
Don't forget to add a few water while digging.
"eat all the pickles" LOL! I can't begin to count all of the vacuum traps I made from tostitos salsa jars. Oh, and all the microwave ovens I let get away, damn!
In 1784 Andrew Crosse was born at Fyne Court in Somerset England, this is near to where i live. In 1836 he was conducting experiments in, what was called back then, electrocrystallization. The locals were frightened by his 'witch craft' due to the bright lights that emanated from the Court windows at night. He would be totally mind blow if he could see what experiments can be done at home with parts reclaimed from an old microwave oven. Brilliant,
you can achieve that "witchcraft" even with less effort.
Use a RGB-Led and a arduino, or if you are a novice wizard then just use 3 potentiometers instead ;D
That's awesome. Just learning about this technology. I appreciate the video. I'm curious about the placement of the substrate that you are coating. Does it have to be directly over the target or could it be anywhere in the chamber? I noticed that the glass jar wasn't coated and I'm wondering why. I saw another video that showed deposits on their chamber.
Hi Noneya,
Substrate have to be set near plasma so that many sputtered Cu atoms bomber the substrate. The farther from the plasma the thinner coating. More and more deposition gives the chamber thicker coating unless otherwise cleaned up.
Wow, fantastic.
YT rich, could this method be used to make gold coated jewelry?
PVD is much better than electroplating but the pvd machines are so big and very expensive...
sebastien guyonnet,I don't recommend to use this method to jewelries. Because basically this is a method to make thin film on a planer substrate, not for complicated 3D shape objects like flower, butterfly, etc. Phsicaly sputtered atoms, ex. copper, flies straight from the target to the substrate. It is just like a light. So it makes sunny place and shadow. No depositon will be obtained under over hang. To avoide it you need to move the object roundng against the target. It is too difficult to do on your desktop. Further, the film you will get after such huge effort will not have enough thickness for jewelries. In conclusion, I think chemical plating is the best way to get uniform gold film.
Great setup, didn't know it could be done this simply. Doesn't the residual oxygen in the chamber lead to oxidation of the sputtered Cu?
MrJonEvans,
Yes, residual and leaking oxygen is a problem. The slower deposition rate, the more oxidation of the film. So faster film forming leads better result.
Can we make transistors by sputtering machine?
If the substrate holder were moved further away from the target could the substrate temperature be kept below 50 degrees centigrade?
Thad22, you are right. The further away the lower temperature. But you'll get none on your substrate if you set it far from the plasma. There are appropriate gap between the substrate and the plasma to get better result. In my case, it was around 10 mm.