Intro to sputtering (process to create clear, conductive coatings)
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- Опубліковано 9 лис 2013
- I have finally been successful in creating a conductive, clear layer of indium-tin oxide on a microscope slide. In this video, I show the process and explain how sputtering works.
- Наука та технологія
My grandfather, Manfred Kaminsky, was one of the discoverers of the sputtering effect on metals in the early 1960s! He worked at Argonne National Laboratories! I believe he was also on the team that discovered radiation blistering on solid surfaces
Hey, the setup you have there is quite impressive, especially since it appears you made most of it yourself. I do have two pieces of advice:
1) The crack in your ITO disc likely isn't due to the lack of cooling. Don't get me wrong - you will need cooling. However, cracking is often the result of thermal shock, not overheating. I suspect that you just turned your power supply on to whatever current / power you wanted. The sudden localized heating caused by this is what makes ceramic materials crack. You should ramp your supply - start at a low power, then work up to what you want. I recommend a rate of 1 W/s or less. Also keep in mind that no matter what, your disc can only take a limited amount of total power without bad things happening.
2) You might want to integrate a shutter, so you can shield your substrate from deposition until conditions (presssure, power etc.) are just the way you want them.
Hope this helps, and the best of luck!
Both very good tips. shoot for ~3W/cm² max w/ ITO.
You can probably get an inexpensive MFC on ebay and control the pressure much better, you could even make a control loop if your pressure sensor has any kind of electrical output.
ua-cam.com/video/1d__A9-8ItU/v-deo.html
Wow that revives some old memories of when I worked in a university physics lab in about '75. The postgrad at the next bench to me was trying to do evaporative deposition. He was struggling because his heater kept burning out. He kept coming to me as the resident electronics guru for ways to improve the power control. He ended up borrowing a wardrobe sized stabilized DC power supply from the lab next door, but still was eating heater elements for breakfast. Getting tired of being dazzled by the light from his rig every time he ran it, I suggested putting some tinfoil around it as a heat reflector. He didn't believe it would help and asked our boss. That worthy started scribbling on the back of an envelope, muttering "reflectivity of foil, fourth root of energy ratio, absolute temperature..." "Yes it should be able to get you to 1700°C." Thus encouraged he tried it and it worked.
Beautiful machining, I say this as a machinist. I really like this channel a lot and the things you do, absolutely fascinating and a wonderful blend of technologies and fields. awesome stuff man. awesome.
Have been recommended this by UA-cam before but only having repaired the ribbon cable for a resistive screen did I immediately realise I needed to actually take note of this. Awesome process for electrically linear materials.
that sputter gun you machined is absolutely incredible.
thank you for making this video. I'm in an integrated circuit fabrication class right now and am a visual learner. Seeing your video breakdown of sputtering and the explanation of the difference between sputtering an filament evaporation was a great help!!
This is beyond awesome!
Keep up the excellent work, man. You're an inspiration to us all.
Very nice and informative presentation Ben. Kudos.
One thing worth mentioning though, is the lack of bonding.
You will find that bonding the target to the backplate using Indium will greatly reduce failure by thermal shock, which is an inherent problem when working with any oxides/ceramics targets.
Great machining! I had heard the term "sputtering" before but had never appreciated how it coated stuff. Thanks for the presentation.
This isn't the first time I've seen magnetron sputtering on UA-cam, but it's definitely the most professional setup I've seen so far.
You make it all look very easy! I`m very impressed with your ingenuity.
Thank you for this video. It has given me some fresh ideas for the aluminum sputtering device I plan on building (for coating telescope mirrors). Now only if I could find a big enough ring magnet, preferably SmCo.
I look at your shop and think this guy is goofing around and having fun. Then I see what you make, and I think holy crap he's a mad scientist making lab grade equipment.
And he does it all just because he can
Wow. Brilliant. Still learning from many of your old videos. Thanks!
Your are such a cool guys who always surprise us with these pretty cool pieces of equipments.
Really appreciative piece of work... He is clearly knows what he is talking about!!!
Fantastic job on the machining, its like a work of art. I can't wait to see what you plan to do with CLEAR conductors
Really cool stuff, Ben! I really enjoy your videos. I think indeedItdoes is on the right track with better thermal conductivity to prevent cracking. In the cleanroom I work in, we always use a thin copper mesh between the heat sink and target to improve thermal conductance. Also, when sputtering ceramics and ITO, I have found that a ~2 minute ramp up and slow ramp down is critical to prevent cracking your target.
that shiny reflector in a Maglite flashlite is coated in aluminium by the evap method ... I used to do that for work !
Fascinating video as usual ben! I've no idea how any of it works but its still very interesting.
IT'S ALIVE! IT'S ALIVE! Very nice, as always. Your work is amazing.
Beyond my level of understanding, keep up the good work, I am intrigued.
Ben I would love to hear your thoughts on how to find read and gleam data from academic literature and patents. It is a soft skill that is hard to communicate but you are clearly extremely good at it and I think it would be an excellent video topic.
very cool to see this after watching your other video on your Thermal Evaporator. Nice to see you have a solution that works.
Really nice setup, looking forward to seeing how the depositions work out for your circuits and devices now.
I was just at the point where I wanted to build a high-voltage feed-through to a vacuum chamber ... and found your idea to use a spark-plug a beautifully simple off-the-shelf solution..
Simply awesome I admire your abilities. Keep following those dreams.
Wow, what a great interesting video! Love the dialog.
It's so funny when you say something like "is relatively simple in construction...". Awesome video as always. Thumbs up!
the machining work you are doing is wonderful!
Brain is filling with so much useful knowledge my mind is blowing - thank you for your videos...
Thank you Linus for recommending this video
Thank you for a good dose of awesome engineering.
man, you are 100% pure awesome
I learned the evaporation method way back coating my first telescope lense with aluminum was quite exciting to see a sheet of aluminum just vanish and coat the glass.
I wish I knew electronics as much as you did, looks like you have a lot of fun
Beautiful build and a very informative video, thanks very much.
Stumbled on to your video, NICE, Only seen ITO coating done in a evaporation process . Have to checkout your other videos.
Quite similar to some of the processes used in quartz crystal production.
Sputtering didn't use a HT process, but we had an ion etch system that eroded the crystal electrodes in a controlled manner to raise the oscillation frequency of the crystal.
This guy is different. He is doing things on youtube most people aren't.
Wow Ben. That is some laboratory quality machining there! Nicely done.
Cool vid reminds me when I had the opportunity to operate ODME cd producer spudder gun and high grade pucks for cd coat on lexan disc. In fully automated robotic machine. Was amazing tech 20 plus years ago
Thank you. I really appreciate this video. Nice work
Outstanding work thank you for this 👏👏🙌🙌
Came here from linuses ridiculous build lol
What?
I was literally just here for the same thing.
Same
Hey Ben! I'm Chris from Bulgaria. Big fan! An ITO layer is completely transparent because both Indium and tin oxides are colorless compounds. What you have there is a target made of Indium and tin metals. In order to obtain an oxide layer you need to perform what is called "reactive sputtering" that is that you NEAD to have oxygen in the chamber. What you made there is just a coating of tin + indium metals. Sorry to disappoint you but now I can`t wait to see your reactive sputtering system :)
Thats cool dude.. Love it
Looks cool 😎.
Very informative.
Thank you 🙏🏻
Another fascinating project Ben - nice machining too.:)
You make science very seductive. Nikola would be proud.
Dude-you're a machining maniac!
That is not at all how I thought the process worked, but it does sound quite a bit easier. If I had a vacuum rig, I'd be building that right now. Very cool project Ben.
You know we have come a long way when we can say things like:
"when your material turns into another material" without a pause or explanation.
Oh, science. Why you so gewd.
I'd recommend using compression fittings for the cooling system. Threaded connectors have a built-in pathway for liquid to exit, even with sealants. Liquid exiting and causing shorts on this wonderful POC would be no bueno.
The magnetic field direction combined with the 'direction' of the current flow should make an observable difference. Also.... placing another magnet of the correct polarity above the target may also improve the process according to my understanding. If you are not familiar with Ken Wheeler's study of magnetic phenomena it might be worth looking into. It may not be particularly useful for this project. But I am all kinds of excited to see that plasma field you created there and it has inspired me to start yet another ridiculous project, lol Great work, btw!
Great video, clear explanation. What makes the sputtered aluminum firmly stick to the glass? Why doesn't it just wipe off easily afterward?
@Alphonso Stufflebean nope, no one gives a single damn.
@Alphonso Stufflebean also a friend requires the person to find you as a friend back
ua-cam.com/video/1d__A9-8ItU/v-deo.html
speed
Probably van der waals forces because good contact is achieved, similar to cold welding or why gage blocks wring together.
Excellent explanation for sputtering Technique
Excellent tutorial! I tried my hand at sputtering many years ago. It was a very crude, simple setup, but it worked! I used a MOT and a variac (as you mentioned in the video) and no argon (only ambient air). If you sputter long enough, you can make decorative metallic coatings on glass, which is what I was trying to achieve. Just curious what you do for a living. Thanks!
The apparatus that you have built there is very similar to a farnsworth fusor. Being one of the few people to make your own thermonuclear fusion devices would be great geek cred.
Ben, I need video of the sputtering gun in the dark!
I think it's about time you start building a cold fusion reactor. The stuff so far has been childs play ;)
What a great video! Thanks.
I have taken apart some large sputtering machines in the past. They used an MKS 250 pressure controller with a control valve and vacuum gauge. Probably $300 total on ebay if you know what your looking for. I can calibrate and tune it for argon free if you like, I work with vacuum equipment for a living so this be intriguing...
Glad to have found your video. It is nice to get quality educational content amongst the heeps of rubbish around here.
"And the hose runs to my argon cylinder"
Of course it does. Where else would it go. I too need to go and check on my argon cylinder that I happen to have in my garage.
This guy is awesome. Is he a uni professor or something? I can't think how else you would just GET all this stuff.
He's actually Mark Watney
A lot of these things are available from suppliers online. It's not cheap, but if you have the time and money... A quick google and I've found an argon bottle available for delivery from £100. Other parts he's machined himself so all you need is access to milling machines, lathes and pillar drills as well as the raw materials. The only other thing needed is the expertise, which is what Universities and youtube videos are for.
he worked for Google doing research and then worked for valve doing hardware prototyping so he makes the big $$$
You buy it. It's not anything controlled or secret or special. Most people don't have a need for it, but it's a common welding supply, so it's not exactly hard to find.
antiswattt3 I would estimate it to be somewhere in the range of Stahlrim and Argonian.
Very nice explanation!!!!
Very Nice!! Love this video
This was the closest to a real life evil genius I have seen. Although I dont think Ben is evil. At least I hope for the sake of the rest of us :)
Happy experimenting. Always fun to hear what you do.
at UMIST Manchester as a student in 1990 we were demonstrated a sputter coater, it was a molybdenum boat with the silver pellet and it just blew it out . big time . 50A ,
You are more criative than 99.99% of everyone.
Whenever I change the lubricant car I wonder who assures me that lasts that long?
i dare you to make a machine or technique to confirm the automotive lubricants durability!
YAY, A Ben krasnow video to watch while I eat breakfast. :D
I watched all your "vacuum" videos - nice job! Since I am also in the progress to build a similar system to sputter Al to make mirrors: I can see your vacuum measuring sensor is facing straight into the vacuum chamber. Isn't there the danger that over the time, you will also coat the inside of your penning/pirani gauge?
Currently, I have to decide if I place the penning and/or the pirani gauge straight onto the chamber's bottom plate OR to put them both on the tube which connects the oil-diffusion pump with the chamber's bottom plate.
What would be your recommendation?
Thanks again for your great videos.
Great work, thanks for sharing and keep them coming! :) P.S. Would love to see something about vanadium dioxide as a photochromic agent for IR reflectivity. Seems to be some buzz about it for years, but no revelation. Could it be... "vapor"-ware?
Cool man, good job!
Ben, I think your selfless UA-cam howtos should make you a candidate for something like a MacArthur Foundation Fellowship. Unfortunately, the Foundation does not accept nominations. I just hope hope someday, somehow, the collective body of what you explore and share here on the Internet will come to the attention of the movers and shakers in the Foundation, e.g. Robert Galluci, Joi Ito, Daniel Huttenlocher, Mario J. Molina, as you are doing a lot of good here. The MacArhur Foundation is probably besieged by academia with their sophisticated fund raising divisions that the garage tinkerer who gladly shares his discoveries has no hope for consideration.
Tinkerers are an overlooked bunch and the United States needs to foster more of them. (I was acquainted with Stan Avery, he started his label empire in his garage, and if he were alive today, I'd bring to his attention what you do, I think he would have admired what you accomplish.) With more money available to you, I think you, with maybe an assistant, could do even more.
University of Chicago has done some interesting work on an electro catalyst capable of converting co2 to ethanol at low power. It’s a small volume copper deposited on carbon and the catalyst operates at low voltages. Might be interesting to look into creating with the sputtering
If I wanted to get an optical quality coating of silver on (for example) BOPET film, what would be the best method? And do you think it would be possible to create a coating thick enough to produce a usable mirror surface? Great vid!
Incredible work as usual, do you have a link to some of the documentation you read up on? I'd like to learn more about this technique.
Very nice video! thanks!
"Bloody Hell, Ben" moments: 4
You make me wish I had your motivation.
VERY GOOD WORK
Tbh,
I'd have one of these just because it looks so damn cool!
You should use PTFE coated bolts. Theyll provide the electrical insulation you're looking for and will also be effective at pressure containing.
amazing as allways
Hey Ben! It's always nice seeing your DIY's project! Anyway, would you like to make video on making a vacuum chamber?
Hope you'd consider it. Thanks!
First, thanks for the great videos! second, could it be possible to sputter graphite to single layer graphene to microscope slide?
Amazing video thank you so much!
Good Work!
Damn...Excellent conductivity...!
Great video. Thank you.
Very interesting.
I wonder if you could use a high ppi lcd panel instead of a mask, when exposing photoresist to uv light. I guess the small grid between pixels will be a problem, and I don't know if lcds can block uv light
It's the principle for coating mirrored sunglasses or applying anti-refflex coating (that green transparent layer on glasses or camera lenses)... So cool mister!
Very underrated channel
"stupid safety interlocks". i love this channel
Where did you get the ITO disc?
You're a man with infinite resources! Great job, Ben.
Doug
You can avoid cracking the target by gradually increase the power applied on it (5 W per minute). You can find a document on Lesker website about power density on various metals and semiconductors.
I have no idea what you said in about 50% of this video but it sound really cool.
Can this particular system be used to make quarter wavelength optical coatings?
Since I've seen Å/s speed controller and replaceable source i've thought fairly possible. But, any buts?
Thanks for your awesome videos Ben. I do some vacuum experimenting myself and worry about x-rays. What are your thoughts, do you think you are getting x-rays in your sputtering experiments?