How Extreme Ultraviolet Lithography works | Part 3/3
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- Опубліковано 24 чер 2020
- Dr. Sascha Migura | Semiconductor Optics: Extreme Ultraviolet Lithography
Optics is a key technology with inspiring applications - such as in the production of increasingly powerful microchips. As a global technology leader in lithography optics and equipment, ZEISS is shaping the nanoelectronics age. This way ZEISS enables the continuation of Moore‘s Law, and with that the steady progress of the semiconductor industry.
Learn key aspects of the world of advanced optics for nanoelectronics in this recording of Dr. Sascha Migura’s talk on “Semiconductor Optics: Extreme Ultraviolet Lithography”. The three videos will give you a first insight into semiconductor optics for Extreme Ultraviolet (EUV) Lithography. Learn more about the development of EUV optical systems and the manufacturing processes behind the systems that will enable a continuous improvement in resolution. The learning videos are triggered by the Important Project of Common European Interest (IPCEI).
► Part 1: • How Extreme Ultraviole...
► Part 2: • How Extreme Ultraviole...
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► Visit www.zeiss.com/semiconductor-m... for more details. - Наука та технологія
Excellent series explaining the history and technology requirements of EUV systems! The series also highlights how the development of EUV technology over the past three decades has been a global endeavor, including government research labs, private companies such as Zeiss, along with other institutions. Thank you for making this video series available.
Great video series! It would be great to learn more about the manufacturing techniques used for achieving picometer-scale roughness on the reflective optics. Zeiss and ASML are truly a powerhouse in enabling Moore's law to continue!
Dr. Moore says that it isn't really continuing, though it has been driving the industry on. It's a Law which is now, "long in the tooth". And it was based on $30 transistor costs, in the 1960s, which was actually closer to $8 or less costs. [That's more than I payed for my first one in about 1965, and they plummeted after that.] That kind of growth driving the world society is unsustainable at this juncture.
[The Pentagon just announced that UFOs, (AFPs) flying at13,000 mph capable of turning at a g-force of 70 exist! (60 Minutes TV as well). I wonder what Dr. Moore, worth $13 billion at 92, will say to his law in 10 years. All bets are off, I would think. New game.]
Nice video.
What is fascinating- that even at ZEISS ideas from all over the world from different people have been adopted to build such a great product as EUV.
The entire series is so well done! Thank you, Dr. Migura.
Excellent video.., well beyond my comprehension 🙏🙏🙏🙏
01:35 Requirement for the Repeatability of the Measurement
06:27 Surface Deviation
07:02 Analogy
07:20 Si/Mo Coating
07:49 Reflectance Curve
08:22 EUV Reflectance vs DUV Transmission
11:15 Barrier Layer
13:47 Mirror Positioning
If you say so...I was just waiting for the break to get some popcorn.
@@tonylorenzano1830 HA!
Dr. Sascha Migura, Appreciate your efforts to present a rudimentary of Highly Complex EUV system in a Lucid and uncluttered manner. Very Informative and Crisp Lecture Series.
Ya, I think I get what you said--Like that!
These were very interesting videos, so many new pieces of information!
I'm proud to do my Part in this
Nice, please post more series!
Wow
I wonder what would happen if Zeiss decided to rotate a Michelson Morley interferometer vertically.
Maybe we can use the computer to control the light to carve
Well, I loved it, but how long before you exceed the Ultraviolet and go to the next level radiation [ which you are working on now]? And what of the two "complainers" of this video above??
Hello Tony, ZEISS is already working with its partners on the next EUV generation. This will be launched on the market in the next few years and will enable even smaller, more powerful and more energy-efficient microchips than ever before.
@@zeissgroup Thank you! Loved the video!
xray litho is ded in the water because stray electrons limit its resolution to the same as EUV
Please, STOP! Chinese are looking your videos!!
Rudimentary information of this nature does not do anything. You might as well panic because the chinese are working on ion beam lithography.
@@nickl5658 Nick, are you member of CPC?
@@robertroberto4749 Hello, I'm a member of the CCP. After silicon-based chips will approach their physical limit in the future, we are investing heavely into next-generation carbon-based graphene chips to skip the lithography machine manufacturing process.
@@Spextori graphene chips are like FUSION ENERGY, QUANTUM COMPUTERS and ANTIGRAVITY, always 30 years in future, ha, ha, ha.
Robert, to late , Y saw all this. But dont worry, we make that different, without optics, only with laser from a laserpointer fore 1 Dollar.