#FMD
Вставка
- Опубліковано 15 жов 2024
- Short information:
Integrated, certified production line for the processing of individual #SiC-based prototype devices
Front-end (wafer sizes of 100 mm and 150 mm): all process steps e.g. #epitaxy, #ICP dry etching, growth of silicon dioxide, aluminum implantation at elevated temperatures, activation tempering or conductive contact alloy
Back-end: new integration technologies and innovative assembly and system concepts for #prototyping
Possibility to realize particularly complex and compact structures, heavily stressed (special) applications with small quantities or durable high-temperature #power electronic modules
Our FMD = 13 institutes. EUR 284.5 million investment until the end of 2019 enabled 215 equipment installations and thus the improvement and renewal of the research infrastructure of our member institutes.
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