Ellipsometry & CompleteEASE Part1: Fitting basics for transparent films

This video introduces you to data analysis using the completeEASE software for our J.A. Woolam M-2000 spectroscopic ellipsometer. In this you will see an example of modeling Aluminum Oxide sputtered on Silicon using a Cauchy function.
Note that this is not a substitute for a course in ellipsometry. These examples are basic and do not cover fundamentals of how ellipsometry works.
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Disclaimer: This video is intended to serve as supplemental information and cannot replace in-person instrument training. Caltech and KNI are not responsible for how the presented information is translated for use in other facilities.
For information or questions about this video, contact [e-mail]

[@MohammedIslamElshiekhElsmani]

Interesting!!

[@saisandeeplolla5967]

Thank you for the video. If I may, can you please tell me about how to infer the uniformity of a measured layer using the parameters obtained. Do MSE (mean squared error) and thickness confidence have to do anything with this? Thank you

[@daninil1]

Thanks for the video. Is there any way of doing a global fit in such a way that the optical parameters are the same for all the positions, but that the thickness can vary? I know it is possible if you first fit the optical parameters and then use that to only look at the thickness.

[@thekavlinanoscienceinstitu9490]

Yes, that's correct. You would fit the optical parameters at one measurement point and then keep them constant while you perform a global fit (fit scan data) with thickness as the only parameter to be fit. You might do something like that if your fit is very good and is showing that your index is essentially unchanged across the scanned region. Though you will probably find that in most cases this barely has an effect on the thicknesses reported at each scan point if the fit is already very good.

[@jl8486]

Hello the range of fitting is from 400 to 1000nm, would it be more accurate if increase the range from 400 to 2000nm? Thanks a lot.