Can someone tell me how when the FOUP cover is removed, particles on the outside of the door and edges of the door are not contaminating the tool? I know it is all in a clean room but I assume the inside of the tool is much cleaner than the rest of the Fab.
loadport operation. the foup is loaded onto the loadport then n2 is vented into the foup and then docking happens to the door and then the door is latched and carried down then it scans the foup.
Can someone tell me how when the FOUP cover is removed, particles on the outside of the door and edges of the door are not contaminating the tool? I know it is all in a clean room but I assume the inside of the tool is much cleaner than the rest of the Fab.
loadport operation.
the foup is loaded onto the loadport then n2 is vented into the foup and then docking happens to the door and then the door is latched and carried down then it scans the foup.