Hello, thank you very much for the explanation!! I did nanoidentation on a photoresist with 3 different layer thicknesses (4.5um, 5.2um and 6.5um) with a penetration depth of 500nn. i'v come to the conclusion that when the thickness of the photo resist is bigger, then the foto resist is harder. Do you have an idea why?? Thank you very much!!!
Hello, thank you very much for the explanation!!
I did nanoidentation on a photoresist with 3 different layer thicknesses (4.5um, 5.2um and 6.5um) with a penetration depth of 500nn. i'v come to the conclusion that when the thickness of the photo resist is bigger, then the foto resist is harder. Do you have an idea why?? Thank you very much!!!