Stanford Nanofabrication Facility: Dry Etching - Basics of Plasmas & Types of Tools (Part 2 of 4)

Dr. James McVittie goes into further detail on Dry Etching: Basics of Plasmas & Types of Dry Etching Tools (Part 2 of 4) from Stanford Nanofabrication Facility (SNF).
This video is part of an open online course found here: lagunita.stanford.edu/courses...
For more information:
snf.stanford.edu/
nanolabs.stanford.edu/