How Samsung Semiconductor is utilizing EUV?

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  • Опубліковано 29 чер 2024
  • Samsung Foundry has recently published EUV Minimum Pitch Single Patterning paper.
    What results did Samsung Semiconductor make using EUV?
    Check out the EUV, OPC, and the results of the efforts right now in the video, explained by Master Jeong-hoon Ahn, the lead author of the thesis.
    📌 Time stamps
    00:00 Prologue
    00:48 What is BEOL?
    01:30 SLO and Micro-bridge
    01:51 Reasons for choosing MPT
    02:06 Limitations of MPT
    03:01 Optimizing OPC
    03:25 SLO and Micro-bridge Optimization Direction
    04:04 Improvement effect
    04:32 TDDB verification
    04:51 The result of hard work
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    #samsungsemiconductor #EUV #OPC
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