T8.3.8 Smart, adaptive and intelligent wafer handling
Вставка
- Опубліковано 16 лис 2020
- Video of joint efforts of XENON, HOST and ZS-Handling. Wafers are extracted from the wafer box, with information of wafer warpage taken into account. Wafers are transferred to touch-free Sonotrode handling, flipped and put back into wafer box.
