ASU Core Facilities Equipment Showcase: KLA Zeta 300

The ASU Core Research Facilities house state-of-the-art equipment, including the KLA Zeta 300, an instrument used instrument for non-contact, 3D surface topography measurements.
It measures an array of sample features, from transparency and reflectance levels to textures and step heights ranging from sub-nanometers to millimeters. It accommodates 300mm wafers with an extended z-stage for samples up to 280mm tall.
The Zeta-300's fully automated measurement features efficiently analyze pyramid sizes and heights on textured wafers, fingers and busbars. Crucial for process control, it excels in inspecting wet etch processing of SHJ solar cells, optimizing efficiency through detailed analyses of metal grid printing and defect inspection.
Learn more about the KLA Zeta 300 and how to use it for your research at cores.research....
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