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Low temperature means how low the temperature can be reached? (below 70-degree C)
C2R lowest process temperature is 20 degrees C. The plasma allows many processes to be carried out at lower temperatures compared to traditional thermal ALD processes. Thanks for your comment!
Low temperature means how low the temperature can be reached? (below 70-degree C)
C2R lowest process temperature is 20 degrees C. The plasma allows many processes to be carried out at lower temperatures compared to traditional thermal ALD processes. Thanks for your comment!