『半導體監測系列』半導體廠什麼設備適合做振動用之保養？What equipment in a semiconductor factory is suitable for PDM?

預知保養是智慧工廠重點項目之一，對於半導體廠有哪些關鍵設備需要且適合安裝振動監測系統，一次分享給大家。Predictive maintenance is one of the key projects of smart factories. We will share with you all the key equipment in semiconductor factories that are required and suitable for installing vibration monitoring systems.